공과대학 - 공과대학

  • 교수 반도체재료/소자
  • 김형섭
    Lab 반도체재료소자연구실

관심분야

차세대 메모리/로직 반도체 소자용 재료/공정/소자 기술 

학력

  • 서울대, 무기재료공학과, 학사(1988-1992)
  • 서울대, 무기재료공학과, 석사(1992-1994)
  • Stanford Univ., 재료공학과, 박사(1999-2004)

약력/경력

  • 1994년∼1999년: 삼성전자 반도체연구소 전임연구원
  • 2004년∼2005년: 스탠포드대학교 전자공학과 박사후연구원

학술지 논문

  • (2023)  Three-Dimensional Surface Treatment of MoS<sub>2</sub> Using BCl<sub>3</sub> Plasma-Derived Radicals.  ACS APPLIED MATERIALS & INTERFACES.  15,  39
  • (2023)  Direct growth and interface reactions of ferroelectric Hf0.5Zr0.5O2 films on MoS2.  APPLIED SURFACE SCIENCE.  629,  -
  • (2023)  Wafer-Scale Epitaxial Growth of an Atomically Thin Single-Crystal Insulator as a Substrate of Two-Dimensional Material Field-Effect Transistors.  NANO LETTERS.  23,  7
  • (2023)  Electrical properties of HfO2 on Si1−xGex substrates pretreated using a Y precursor with and without subsequent oxidant pulsing.  ACS APPLIED ELECTRONIC MATERIALS.  5,  2
  • (2023)  Combined effects of the deposition temperature and metal electrodes on ferroelectric properties of atomic-layer-deposited Hf<sub>0.5</sub>Zr<sub>0.5</sub>O<sub>2</sub> films.  JOURNAL OF PHYSICS D-APPLIED PHYSICS.  56,  6
  • (2023)  Solution printable multifunctional polymer-based composites for smart electromagnetic interference shielding with tunable frequency and on–off selectivities.  ADVANCED COMPOSITES AND HYBRID MATERIALS.  6,  1
  • (2022)  Sublayer thickness dependence of nanolaminated HfO2-Al2O3 films for ferroelectric phase stabilization.  APPLIED PHYSICS LETTERS.  120,  22
  • (2021)  Thermal stability of MgO film on Si grown by atomic layer deposition using Mg(EtCp)2 and H2O.  CERAMICS INTERNATIONAL.  47,  22
  • (2021)  3D-to-2D phase transformation through highly ordered 1D crystals from transition-mental oxides to dichalcogenides.  MATERIALS TODAY.  47, 
  • (2021)  Comparative study of C-V-based extraction methods of interface state density for a low-temperature polysilicon thin film.  MATERIALS RESEARCH EXPRESS.  8,  8
  • (2021)  Unveiling the Origin of Robust Ferroelectricity in Sub-2 nm Hafnium Zirconium Oxide Films.  ACS APPLIED MATERIALS & INTERFACES.  13,  30
  • (2021)  Effect of H2S pre-annealing treatment on interfacial and electrical properties of HfO2/Si1-xGex (x=0-0.3).  JOURNAL OF MATERIALS CHEMISTRY C.  9,  5
  • (2021)  Area-Selective Atomic Layer Deposition of MoS2 using Simultaneous Deposition and Etching Characteristics of MoCl5.  PHYSICA STATUS SOLIDI-RAPID RESEARCH LETTERS.  15,  2
  • (2021)  Sulfidation characteristics of amorphous nonstoichiometric Mo-oxides for MoS2 synthesis.  APPLIED SURFACE SCIENCE.  535, 
  • (2020)  Introduction of an Al Seed Layer for Facile Adsorption of MoCl5 during Atomic Layer Deposition of MoS2.  PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE.  217,  15
  • (2020)  Resistive switching and synaptic behaviors of an HfO2/Al2O3 stack on ITO for neuromorphic systems.  JOURNAL OF ALLOYS AND COMPOUNDS.  826,  -
  • (2020)  Intriguing morphological evolution during chemical vapor deposition of HfS2 using HfCl4 and S on sapphire substrate.  APPLIED SURFACE SCIENCE.  509,  -
  • (2019)  Electrical properties of the HfO2/Al2O3 dielectrics stacked using single- and dual-temperature atomic-layer deposition processes on In-0.53Ga0.47As.  SEMICONDUCTOR SCIENCE AND TECHNOLOGY.  34,  10
  • (2019)  Pt-doped Ni-silicide films formed by pulsed-laser annealing: Microstructural evolution and thermally robust Ni1-xPtxSi2 formation.  JOURNAL OF ALLOYS AND COMPOUNDS.  788,  1
  • (2019)  Ultrathin monolithic HfO2 formed by Hf-seeded atomic layer deposition on MoS2: Film characteristics and its transistor application.  THIN SOLID FILMS.  673, 

특허/프로그램

  • 반도체 구조의 제조 방법 및 반도체 소자.  10-2018-0169733.  20200424.  대한민국
  • 핀 구조를 갖는 반도체 소자 및 이의 제조 방법.  10-2018-0169742.  20200424.  대한민국
  • 인버터 소자 및 이의 제조 방법(INVERTER DEVICE AND PRODUCING METHOD OF THE SAME).  10-1693663-0000.  20170102.  대한민국
  • 전이금속 디칼코게나이드 박막의 형성 방법(METHOD OF MANUFACTURING A TRANSITION METAL DICHALCOGENIDE THIN LAYER).  10-1532883-0000.  20150624.  대한민국
  • 반도체 소자 및 반도체 소자 제조 방법.  10-2014-0036699.  20150416.  대한민국
  • 이중층 구조의 반도체 채널을 구비하는 박막트랜지스터 및 이의 제조방법(THIN FILM TRANSISTOR HAVING DOUBLE LAYERED SEMICONDUCTOR CHANNEL AND METHOD OF MANUFACTURING THE THIN FILM TRANSISTOR).  10-1417932-0000.  20140703.  대한민국
  • 결정질 산화막을 포함한 저항 메모리 소자 및 이의 제조 방법(RESISTIVE MEMORY DEVICE COMPRISING CRYSTALLINE OXIDATION FILM AND METHOD OF FABRICATING THE SAME).  10-1401221-0000.  20140522.  대한민국
  • 저항 메모리 소자 및 이의 제조방법(RESISTIVE RANDOM ACCESS MEMORY DEVICES AND METHODS OF MANUFACTURING THE RESISTIVE RANDOM ACCESS MEMORY DEVICES).  10-1356958-0000.  20140120.  대한민국
  • 산소 플라즈마 처리된 채널층을 포함한 박막 트랜지스터 및 이의 제조 방법.  10-2012-0073819.  20131227.  대한민국

학술회의논문

  • (2016)  Electrical and Chemical Properties of HfO2/Al2O3 on In0.53Ga0.47As Annealed at Different H2 Pressures.  Pacific Rim Symposium on Surfaces, Coatings & Interfaces.  미국
  • (2016)  Comparative Study of the Ni-Silicide Films formed on Si and Strained Si:P.  Pacific Rim Symposium on Surfaces, Coatings & Interfaces.  미국
  • (2016)  Electrical Properties of the Atomic-Layer-Deposited Al2O3 on GaSb pretreated with TMA and TDMAT.  Pacific Rim Symposium on Surfaces, Coatings & Interfaces.  미국
  • (2016)  Optimization of the ZnO Passivation Process on p-type In0.53Ga0.47As Using Atomic Layer Deposition.  Pacific Rim Symposium on Surfaces, Coatings & Interfaces.  미국
  • (2016)  Atomic Layer Deposition of Al2O3 films on Various Two-Dimensional Materials.  Pacific Rim Symposium on Surfaces, Coatings & Interfaces.  미국
  • (2016)  Effect of surface cleaning methods on the interface characteristics of an HfO2/Al2O3 gate stack on InP with different crystal orientations.  11th Korea-Japan Conference on Ferroelectrics.  대한민국
  • (2015)  Self-cleaning effect of half-cycle diethylzinc treatment on the electrical properties of HfO2/In0.53Ga0.47As.  EuroCVD20.  스위스